| 论文编号: | |
| 第一作者所在部门: | |
| 论文题目: | fabrication of multilayer fresnel zone plate for hard x-ray microscopy by atomic layer deposition and focused ion beam milling |
| 论文题目英文: | |
| 作者: | yanli li, weier lu, shanfeng wang, qingxi yuan, xiangdong kong, li han, yang xia |
| 论文出处: | |
| 刊物名称: | vacuum |
| 年: | 2023 |
| 卷: | |
| 期: | |
| 页: | |
| 联系作者: | |
| 收录类别: | |
| 影响因子: | |
| 摘要: | |
| 英文摘要: | |
| 外单位作者单位: | |
| 备注: | |
fabrication of multilayer fresnel zone plate for hard x-ray microscopy by atomic layer deposition and focused ion beam milling