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论文题目: | study on total reflection performance of films grown by atomic layer deposition relevant to x-ray reflective optics |
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作者: | li, yl (li, yanli); lu, we (lu, weier); zhang, xy (zhang, xinyue); kong, xd (kong, xiangdong) ; qu, f (qu, fei); han, l (han, li) |
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刊物名称: | applied optics |
年: | 2022 |
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study on total reflection performance of films grown by atomic layer deposition relevant to x-ray reflective optics